OBD : Optical Beam Deflection

The excitation of the piezoceramic -and therefore the wafer- is controlled by a network analyzer. OBD is used to determine the exact value of natural frequency of the first mode. OBD is a well-known non-destructive optical method: a laser beam is focused on the sample by means of a microscope objective. The reflected beam reaches the four-quadrant photodiode used as a vibration detector. The photodiode signal is compared to the excitation frequency leading to the exact value of the first natural frequency of the microstructure.

OBD :

- Non destructive

- Low cost

- Resonant frequency measurement

- Deflection measurement

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DELFMEMS. Intellectual property of O.Millet. 2003-04.