Ellipsometry

A modification of external UV-visible reflection spectroscopy which can yield information on the thickness of overlayers, even though they are non-adsorbing. The technique measures change in the polarization state upon reflection rather than the reflected power. It has been applied to study of adsorbed monolayers on polymers. Used for thickness measurement of thin layers.

Ellipsometer

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DELFMEMS. Intellectual property of O.Millet. 2003-04.