High-Cycle Fatigue of Polycrystalline Silicon Thin Films in Laboratory Air
Numerical Fracture Analysis of MEMS devices
Reliability of polysilicon microstructures : in situ test benches
Reliability of packaged MEMS in shock environment : crack and stiction modeling
Reliability of polysilicon microstructures : in situ test benches
Robustness and Reliability of Micromachined Scanning Mirrors
Chapitre 'fiabilité' thèse sur les DMSF (commutatuer thermique) chez MATRA
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
MEMS Reliability Assurance Guidelines for space applications
A Fault Simulation Methodology for MEMS
MINIMUM DIMENSION DIMPLE ANALYSIS
Test support Strategies for MEMS
Investigating the reliability of comb-drives actuators utilized in microfluidic and space systems using finite element analysis
MEMS RESONATOR SYNTHESIS FOR DEFECT REDUCTION
Predictive modelling of fatigue phenomenon for polycrystalline structural layers
Feedback of MEMS reliability study on the design stage: a step toward Reliability Aided Design (RAD)
MEMS reliability from a failure mechanisms perspective
The role of interfacial properties on MEMS performance and reliability
Effective Methods to prevent stiction during post-release-etch processing
Control of liquid bridging induced stiction of micromechanical structures
The effect of release-etch processing on surface microstructures stiction
Vapor Phase Deposition of Anti-Stiction Films
Failure analysis
Measuring and Modeling Electrostatic Adhesion in Micromachines
Étude des phénomènes de collage dans les micro et nanosystèmes : mécanisme de défaillance, ou alternative aux verrous mécaniques
On forces in microelectromechanical systems
A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS
Stiction: Big Problem in MEMS
Surface engineering and microtribology for microelectromechanical systems
Surface forces induced failures in microelectromechanical systems
Adhesion-Related Failure Mechanisms in Micromechanical Devices
Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
High-cycle fatigue of micron-scale polycrystalline silicon films: fracture mechanics analyses of the role of the silica/silicon interface
Suppression of Stiction in MEMS
Wafer level anti-stiction coatings for MEMS
Dichlorodimethylsilane as an Anti-Stiction Coating for MEMS
Elimination of post-release adhesion in microstructures using conformal fluorocarbon coatings
Stiction in surface micromachining
MEMS reliability newsletter: Issue : dielectric charging
Performance and reliability of post-CMOS metal/oxide MEMS for RF application
Microstructure and creep strength of fully-lamellar TiAl alloys containing beta-phase
Critical Reliability Challenges for The International Technology Roadmap for Semiconductors (ITRS)
ON THE FLEXURAL CREEP OF SINGLE-CRYSTAL SILICON
Humidity effect on the critical number of friction cycles for wear particle generation in carbon nitride coatings
MEMS reliability newsletter: Issue : MEMS fatigue
On the role of microstructure in fatigue-crack growth of g-based titanium aluminides1
A General Approach to MEMS Reliability Assurance
FAULT SIMULATION OF MEMS USING HDLS
General Yield and Reliability Considerations for MEMS-Based Flow Systems
Characterization Techniques for Surface-Micromachined Devices
Performance Tradeoffs for a Surface Micromachined Microengine
Dynamic Effects of Linkage Joints in Electrostatic Microengines
DMD reliability: a MEMS success story
The Effect of Humidity on the Reliability of a Surface Micromachined Microengine
The Effect of Frequency on the Lifetime of a Surface Micromachined Microengine Driving a Load
Measuring and Modeling Electrostatic Adhesion in Micromachines
A Fatigue Damage Approach for Life Prediction of MEMS Silicon Components
Joule heat effects on reliability of RF MEMS switches
A small area in-situ MEMS test structure to measure fracture strength by electrostatic probing
A Performance Analysis System for MEMS using Automated Imaging Methods
IMaP: Interferometry for Material Property Measurement in MEMS
RELIABILITY OF MEMS-BASED MASS-FLOW CONTROLLERS FOR SEMICONDUCTOR PROCESSING
DEVICES FOR FATIGUE TESTING OF ELECTROPLATED NICKEL (MEMS)
Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures
Linkage Design Effect on the Reliability of Surface Micromachined Microengines Driving a Load
Interferometric measurement for improved understanding of boundary effects in micromachined beams
MEMS Manufacturing Test
MATERIALS AND RELIABILITY ISSUES IN MEMS AND MICROSYSTEMS
Microelectromechanical Systems (MEMS) based advanced high performance Radio Frequency (RF) systems
Release-etch modeling for complex surface micromachined structures
Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
Tribology of MEMS
Determination of micromechanical properties of thin films by beam bending measurements with an atomic force microscope
In situ and real-time tensile testing of thin films using double-field-of-view electronic speckle pattern interferometry
TENSILE TESTING AT THE MICROMETER SCALE (Opportunities in Experimental Mechanics)
Non-Destructive Resonant Frequency Measurement on MEMS Actuators
Pin-Joint Design Effect on the Reliability of a Polysilicon Microengine
MEMS and reliability
First Reliability Test of a Surface Micromachined Microengine Using SHiMMeR
Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
Nanoscale Displacement and Strain Measurement
High-Cycle Fatigue Failure of Micron-Scale Polycrystalline Silicon Films for MEMS
Tensile Testing of Polysilicon
Characterization of the effects of applied electric fields on fracture toughness and cyclic electric field induced fatigue crack growth for piezoceramic PIC 151
Material and Reliability Requirements for MEMS Packaging
The role of interfacial properties on MEMS performance and reliability
Development of characterization tools for reliability testing of MicroElectroMechanical system actuators
Making MEMS Reliable
Fracture Tests of Etched Components Using a Focused Ion Beam Machine
NANO-SCALE FILM FRACTURE & MEMS
Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions
Prediction of release-etch times for surface-micromachined structures
Reliability of a MEMS Torsional Ratcheting Actuator
CHARACTERIZATION OF ELECTROTHERMAL ACTUATORS AND ARRAYS FABRICATED IN A FOUR-LEVEL, PLANARIZED SURFACE-MICROMACHINED POLYCRYSTALLINE SILICON PROCESS
Reliability Study of Low-Voltage RF MEMS Switches
MEMS reliability : infrastructure, test structures, experiments and failure modes
Ductile Thin Foils of Ni3Al
Analog Devices Reliability Handbook
Material and Reliability Requirements for MEMS Packaging
ADHESION OF POLYSILICON MICROBEAMS IN CONTROLLED HUMIDITY AMBIENTS
A Mechanical Approach to Overcome RF MEMS Switch Stiction Problem
Fault simulation of thermal MEMS
Mesures 3D de topographies et de vibrations à l’échelle (sub)micrométrique par microscopie optique interférométrique.
Routes to failure in rotating MEMS devices experiencing sliding friction
A New Methodology to Investigate Fracture Toughness of Freestanding Thin Solid Films
Low Stress Silicon Nitride Process Development
CHANGES IN SURFACE STRESS MEASURED WITH AN ATOMIC FORCE MICROSCOPE
A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy
Strength Prediction for MEMS Components Transferring Large Loads
Inductive Fault Analysis of a Microresonator
MEMS Sensors and Carrier-Level Reliability
RESIDUAL STRESS AND FRACTURE OF THICK DIELECTRIC FILMS FOR POWER MEMS APPLICATIONS
Processing of Thick Dielectric Films for Power MEMS: Stress and Fracture
Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing
MICRO/NANOSCALE TRIBOLOGY AND MECHANICS OF COMPONENTS AND COATINGS FOR MEMS
Shock Testing of Surface Micromachined MEMS Devices
Length scales for the fracture of nanostructures
Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression
MEMS stress and length measurements using an optical inteferometer
An Investigation of Sidewall Adhesion in MEMS
Material property measurements of micromechanical polysilicon beams
Failure behaviour of microstructures under torsional loads
Time-dependent buckling phenomena of polysilicon micro beams
M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures
Developpment of AFM-based techniques to measure mechanical properties of nanoscale structures
A Micro Strain Gauge with Mechanical Amplifier
INFLUENCE OF FABRICATION AND CRYSTAL ORIENTATION ON THE STRENGTH OF SILICON MICROBRIDGES
Analysis of etched cantilevers
Simulated SAM A-scans on multilayer MEMS components
Reliability of MEMS � a methodical approach
Mechanical Reliability of Silicon Wafers with Through-Wafer Vias for Wafer-Level Packaging
IR Confocal Laser Microscopy for MEMS Technological Evaluation
Investigation of dynamic disturbance quantities in piezoresistive silicon sensors
Techniques to study the reliability of metal RF MEMS capacitive switches.
Microtribological behavior of Au(001) studied by AFM/FFM
Friction and Wear Properties of SiC Overcoats on Polysilicon MEMS
MEMS Packaging & Test
HNDT solution for MEMS testing on wafer level
A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches
From Microelectronics to MEMS Testing
SURFACE-MICROMACHINED BEAMS WITHOUT SPRING EFFECT OF ANCHOR STEP-UP
Vapor Phase Deposition of Anti-Stiction Films
MEMS Packaging and Reliability
Analysis of thermomechanical stresses in a 3D packaged microelectro mechanical system
The advent of MEMS in space
mechanical reliability of MEMS structures under shock
Development of characterization tools for reliability testing of MicroElectroMechanical system actuators
Strength Prediction for MEMS Components Transferring Large Loads
Microreliability, Nanoreliability – Reliability Issues for MEMS
Issues in MEMS Reliability
Reliability of RF-MEMS
Equivalent strengths for reliability assessment of MEMS structures
Reliability testing of flexible printed circuit-based RF MEMS capacitive switches
Thermal fatigue modeling of micromachined gas sensors
MEMS reliability modelling methodology :application to wobble micromotor failure analysis
Reliability-based design of MEMS mechanisms by topology optimization
Fatigue studies of nanoscale structures for MEMSyNEMS applications using nanoindentation techniques
MEMS Device for bending test : measurement of fatigue and creep of electroplated nickel
Development of a nanoscale fatigue measurement technique and its application to ultrathin amorphous carbon coatings
Plasticity size eects in free-standing submicronpolycrystalline FC films subjected topure tension
Strain gradient effect in nanoscale thin films
Plasticity at the micron scale
The mechanism of secondary grain growth in polysilicon films
Intergranular stresses in polycrystalline fatigue: diffraction measurement and self-consistent modelling
Cyclic stress/strain response and dislocation structures in polycrystalline aluminum
MEMS - Material characterization and Reliability
Damage accumulation stages in polycrystalline duralumin under static fatigue loading
A study of dislocation evolution in polycrystalline copper during low cycle fatigue at low strain amplitudes
Creep-fatigue modeling for solder-joint reliability predictions including the microstructural evolution of the solder
Measurement of slow crack growth in silicon and nickel micromechanical devices
Reliability and long term stability of MEMS
Reliability studies of single crystal silicon beams for rigid micro mirrors
Materials reliability in MEMS devices
Micro tensile test of silicon film having different cristallographic orientations
Development of a MEMS testing methodology
Failure modes in surface micromachined microelectromechanical actuators
High-cycles fatigue an durability of polycrystalline polysilicon thin films in ambient air
Mechanical stresses and the reliability of microsystems
testing of MEMS materials and stability
Performance and reliability of a new MEMS electrostatic lateral output motor
Subcritical Crack Growth in Silicon MEMS
Novel Bi-Layer Conformal Coating for Reliability Without Hermeticity MEMS Encapsulation
Fatigue test of Ni-P amorphous alloy micro-cantilever beams
New failure mechanism in silicon nitride resonators
Reliability of surface micromachined microelectromechanical actuators
MICROSCALE STRAIN AND MECHANICAL PROPERTIES MEASUREMENTS
Nontactile reliability testing of a micro optical attenuator
Fracture Strength and Fatigue of Polysilicon Determined by a Novel Thermal Actuator
Challenges in interconnection and packaging of microelectromechanical systems (MEMS)
test and evaluation of chip-to-chip attachment of MEMS devices
Reliability and contact resistance of polysilicon beam leads for use in high-density connector
Size effects of the mechanical properties and reliability analysis of microfabricated polysilicon thin films
Tensile, Creep and fatigue propertiesof LINGA Nickel structures
Reliability of polycrystalline silicon under long-term cyclic loading
Fundamental requirements on MEMS packaging and reliability
Techniques for reliability analysis of MEMS RF switch
Hermeticity and stiction in MEMS packaging
Reliability of microsystems from the material point of view
The reliability of microelectromechanical systems (MEMS) in shocks environments
Design for reliability of micro-electro-mechanical systems (MEMS)
Development of micro-mechanical-testing machine and its application
Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches
Atomic Layer Deposition (ALD) Technology for Reliable RF MEMS
Reliability Test and failure analysis of optical MEMS
Design for Reliability of high voltage, high density interconnects for MOEMS mirror drive electrodes
A Thermomechanical Model for Adhesion Reduction of MEMS Cantilevers
Switch element reliability required to maintain large-scale photonic cross-connect switch reliability
Design for reliability of MEMS/MOEMS for lightwave telecommunications
Experimental characterization of stiction due to charging in RF MEMS
Finite Element Simulation of the fatigue behaviour of a MEMS package
Reliability assessment of high-density multi-layer board assembly using shadow moiré and Luminescence Spectroscopy
High Cycle fatigue test of nanoscale Si and SiO2 wires based on AFM techniques
Dislocations in Si generated by fatigue at room temperature
Advanced getter solutions at wafer level to assure high reliability to the last generations MEMS
Surface topography Evolution and Fatigue Fracture in Polysilicon MEMS Structures
Mechanical reliability of epipoly MEMS structures under shocks load
Reliability of micromachined membranes under particle effects
A novel device for in situ experimental characterization and reliability analysis of DC-contact RF MEMS switches
RF MEMS Reliability
MEMS failure analysis and reliability
Reliability Assessment of Delamination in Chip-to-Chip Bonded MEMS Packaging
Low-Actuation Voltage RF MEMS Shunt Switch With Cold Switching Lifetime of Seven Billion Cycles
MEMS for telecommunications : devices and reliability
Reliability behavior of RF MEMS
The Prediction of Stiction Failures in MEMS
Reliability overview of RF MEMS devices and circuits
MEMS 2-Bit Phase-Shifter Failure Mode and Reliability Considerations for Large X-Band Arrays
Thermo-mechanical reliability aspects and finite element simulation in packaging
Combining DIC techniques and finite element analysis for reliability assessment on micro and nano scale
Ensuring reliability and repeatability in LIGA mold insert fabrication
SUSPENSION VIBRATION COMPENSATION USING A MEMS MICROACTUATOR IN DISK DRIVES
SELF-ASSEMBLED REAL MONOLAYER COATING TO IMPROVE RELEASE OF MEMS STRUCTURES
Effect of adhesion on dynamic and static friction in surface micromachining
Side-by-Side Comparison of Passive MEMS Strain Test Structures under Residual Compression
Nonlocal Problems in MEMS Device Control
Alleviating the Adverse Effects of Residual Stress in RF MEMS Switches
MEMS : technical limitations
Instability in micromachined curved thermal bimorph structures
A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
Failure modes and mechanisms
Notch formation by stress enhanced spontaneous etching of polysilicon
From Microelectronics to MEMS Testing
Fatigue testing of single crystalline silicon
Practical techniques for measuring MEMS properties
MEMS for space applications : a reliability study
The optical measurement station for complex testing of microelements
MEMS reliability in a vibration environment
Tensile-mode fatigue testing of silicon films as structural materials for MEMS
Mechanical effects of fatigue and charge on CMOS MEMS
CYCLIC FATIGUE TESTING OF SURFACE-MICROMACHINED THERMAL ACTUATORS
Modeling of microstructure evolution and mechanical properties in age-hardening aluminum alloys
A small area in-situ MEMS test structure to measure fracture strength by electrostatic probing
Measurement of mechanical properties for MEMS materials
Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems
Radiation Effects in MicroElectroMechanical Systems (MEMS): RF Relays
Fracture Strength of Polysilicon at Stress Concentrations
Surface topology and fatigue in Si MEMS structures
Mechanical stability and adhesion of microstructures under capillarity forces Part 1 : Theory
Mechanical stability and adhesion of microstructures under capillarity forces Part 2 : experiments
High-cycle fatigue of single-crystal silicon thin films
FAULT SIMULATION OF MEMS USING HDLS
Robustness and Reliability of Micromachined Scanning Mirrors
Polysilicon: a versatile material for microsystems
Microstructural and optical properties of as-deposited LPCVD silicon films
MEMS reliability in shock environment
Optical surface roughness evaluation of phosphorus-doped polysilicon films
Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
Microtribological studies of doped single-crystal silicon and silicon films for MEMS devices
Fatigue of polycrystalline silicon under long-term cyclic loading
Microscale modeling and simulation
Reliability of a MEMS Torsional Ratcheting Actuator
A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
Stress characterization of MEMS microbridges by micro-Raman spectroscopy
A Novel Experimental Technique for Testing Thin Films and MEMS Materials
Building Reliable MEMS Micromirrors
Assessment of Mechanical Properties of Thin Films: Residual Stress, Young's Modulus, Fracture Strength, Adhesion, and Load Bearing Capacity
Reliability of Resonant Micromachined
Reliability Investigations in micromechanical Devices
Failure of Silicon:Crack Formation and Propagation Crack Formation and Propagation
Influence of the step covering on fatigue phenomenon forpolycrystalline silicon microlectromechanical systems (MEMS)
failure mechanisms of a MEMS actuator in very high vaccuum
Surface topology and fatigue in Si MEMS structures
test et fiabilité des microsystèmes
versatile tool for characterising long-term stability and reliability of micromechanical structures
MEMS reliability assurance activities at JPL
Drop test and analysis on micro-machined structures
Experimental and theoretical investigations on non linear resonances of composite bickled microbridges
Reliability Issues of COTS MEMS for Aerospace Applications
Hierarchical Design and Test of Integrated Microsystems
CARAMEL : Contamination and Reliability Analysis of MicroElectromechanical Layout
MEMS : Reliability Design
The fabrication of nonplanar spin-on glass microstructures
The effect of humidity on the reliability of a surface micromachined microengine
Determination of maximum allowable strain for polysilicon micro-devices
Fracture and fatigue of polysilicon mems devices
Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
Electrical characterization and modification of a microelectromechanical Systems (MEMS) for extended mechanical reliability and fatigue testing
Adhesion, adhesion hysteresis and friction in MEMS under controlled humidity ambients
Reliability and Fatigue Testing of MEMS
Lifetime estimates of unique failure mechanisms of the digital micromirrors devices (DMD)
Measuring and modeling electrostatic adhesion in micromachines
Effect of temperature on mechanical properties of polysilicon
Optimization of a low-stress silicon nitride process for surface-micromachining applications
MEMS reliability : the challenge and the promise
Controlling the vibrations of beams using viscoelastic potting
Reliability Issues in microelectromechanical systems
MEMS and reliability
Reliability approach in the design of RF microswitches
Damping of a vibrating beam
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Evaluation of Thermo-Mechanical Stability of COTS duax-axis MEMS Accelerometers for Space Applications
Transient electro-thermal simulation of microsystems with space-continuous thermal models in an analogue behavioural simulator