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ZoomSurf 3D System

 

 

The Zoomsurf 3D is the most advanced white light interferometer and phase shift based system profiler available. For more information on the theory of the technique itself please follow this link. Ideal for laboratory and industrial settings where larger sample sizes and finite resolution are required.  Designed with an integrated anti-vibration system, the Zoomsurf provides highly stable metrology.  Motorized X-Y tables are standard, as is auto-focus viewing for automatic stitching of oversized areas.  Optional motorized tables 100mm, 200mm, or 300mm are available. The user can choose from a wide selection of various objectives (Mirau, Michelson, Linnik & Nikon).

All Fogale profilers can be equipped with a frequency generator for stroboscopic study of active MEMS & Membranes.  Allowing the user to study 3D real time vibration modes of MEMS & Membranes in motion, a breakthrough for the study of those materials.  Generator can pulse from 100Hz to 2MHz with steps of 0.1Hz and voltage from +10 to -10 Volts. All resonance frequencies of the device can easily be determined by automatic scan of all frequencies.   

The Zoomsurf  is equipped with the powerful Fogale Mountain Analysis Software.  The Mountain Profile software tool delivers cutting edge technology in analysis and visualization.  Create eye-catching reports with pseudo-color 3D and 2D images, contour diagrams, 3D lined and 3D continuous representation.   Other features include: Abbot and Firestone curve 3D depth distribution, fractal analysis, peak distribution, angle and distance measurement, material and void volume between two slices, hole analysis, power spectrum analysis, autocorrelation and much, much more. Please visit our application page to see some of the results obtained with the system.

 

 
Zoomsurf 3D Main Specifications
Measurement Range 500microns (large range available on request)
Resolution 0.1nm
Sample Stages Motorized (205 x205mm2)

Optional 300mm Wafers (+/- 1micron)

Maximum Sample Size 205x205mm2 Z: 150mm (larger size optional)
Image Zoom Continuous variable zoom with five indexed position: 0.35x, 0.5x & 0.8x, 1.0 x and 1.6x
Focus Autofocus
Light Source White, red monochromatic LED toggled by software (intensity controled by software)

 

Example of Fogale picture.

   
 

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DELFMEMS. Intellectual property of O.Millet. 2003-04.

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